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- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Körstgens, V. ; Meier, R. ; Ruderer, M.A. ; Guo, S. ; Chiang, H.-Y. ; Perlich, J. ; Roth, S.V. ; Gehrke, R. ; Müller-Buschbaum, P.
- Title:
- Grazing incidence small and wide angle x-ray scattering combined with imaging ellipsometry
- Journal title:
- Rev. Sci. Instrum.
- Year:
- 2012
- Journal volume:
- 83
- Journal issue:
- 076107
- WWW:
- https://aip.scitation.org/doi/10.1063/1.4738880
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