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Title:

Highly Reliable Contacts to Silicon Enabled by Low Temperature Sputtered Graphenic Carbon

Document type:
Zeitschriftenaufsatz
Author(s):
Stelzer, Max; Jung, Moritz; Wurstbauer, Ursula; Holleitner, Alexander; Kreupl, Franz
Journal title:
IEEE Journal of the Electron Devices Society
Year:
2019
Journal volume:
7
Pages contribution:
252-260
Fulltext / DOI:
doi:10.1109/jeds.2019.2894975
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
E-ISSN:
2168-6734
Date of publication:
01.01.2019
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