@article{10.1109/JEDS.2019.2894975, author = {Stelzer, Max and Jung, Moritz and Wurstbauer, Ursula and Holleitner, Alexander and Kreupl, Franz}, title = {Highly Reliable Contacts to Silicon Enabled by Low Temperature Sputtered Graphenic Carbon}, journal = {IEEE Journal of the Electron Devices Society}, year = {2019}, volume = {7}, pages = {252-260}, doi = {10.1109/jeds.2019.2894975}, }