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Title:

MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side

Document type:
Konferenzbeitrag
Author(s):
Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut
Book / Congress title:
IEEE International Conference on Electronics, Circuits, and Systems (ICECS)
Year:
2018
Month:
dec
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