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Title:

Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Bosetti G.; Manz J.; Krumbein U.; Schrag G.
Book / Congress title:
EUROSENSORS 2018
Congress (additional information):
Graz, Austria, 2018.
Date of congress:
9-12 September 2018
Year:
2018
Year / month:
2018-09
Month:
Sep
Language:
en
TUM Institution:
Lehrstuhl für Technische Elektrophysik
Ingested:
20.11.2018
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