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Title:

A Nanogap Electrode Platform for Organic Monolayer-Film

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Pfaehler, S.; Keim, K.; Csiki,R.; Nguyen, Q.H.; Liao, K.-C.; Stutzmann, M.
Abstract:
The fabrication and electrical characterization of organic monolayer functionalized, planar silicon nanogap electrode devices is described. Highly doped silicon nanogap electrodes were fabricated with contact separation as small as 200 nm by anisotropic etching of silicon-on-insulator (SOI) substrates using KOH and a patterned metal film as the etch mask. Conductance was greatly improved compared to an untreated device by self-assembly of a monolayer of an aromatic organophosphonate in the nanog...     »
Dewey Decimal Classification:
500 Naturwissenschaften
Book / Congress title:
IEEE 16th International Conference on Nanotechnology (IEEE-NANO)
Congress (additional information):
Sendai, Japan, 22-25 Aug 2016-08
Year:
2016
Quarter:
3. Quartal
Year / month:
2016-08
Month:
Aug
Print-ISBN:
978-1-5090-1494-1
E-ISBN:
978-1-5090-1493-4
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1109/NANO.2016.7751507
WWW:
https://ieeexplore.ieee.org/document/7751507
Ingested:
15.02.2017
Last change:
15.02.2017
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