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Titel:

A Nanogap Electrode Platform for Organic Monolayer-Film

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Vortrag / Präsentation
Autor(en):
Pfaehler, S.; Keim, K.; Csiki,R.; Nguyen, Q.H.; Liao, K.-C.; Stutzmann, M.
Abstract:
The fabrication and electrical characterization of organic monolayer functionalized, planar silicon nanogap electrode devices is described. Highly doped silicon nanogap electrodes were fabricated with contact separation as small as 200 nm by anisotropic etching of silicon-on-insulator (SOI) substrates using KOH and a patterned metal film as the etch mask. Conductance was greatly improved compared to an untreated device by self-assembly of a monolayer of an aromatic organophosphonate in the nanog...     »
Dewey-Dezimalklassifikation:
500 Naturwissenschaften
Kongress- / Buchtitel:
IEEE 16th International Conference on Nanotechnology (IEEE-NANO)
Kongress / Zusatzinformationen:
Sendai, Japan, 22-25 Aug 2016-08
Jahr:
2016
Quartal:
3. Quartal
Jahr / Monat:
2016-08
Monat:
Aug
Print-ISBN:
978-1-5090-1494-1
E-ISBN:
978-1-5090-1493-4
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1109/NANO.2016.7751507
WWW:
https://ieeexplore.ieee.org/document/7751507
Eingabe:
15.02.2017
Letzte Änderung:
15.02.2017
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