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Titel:

Towards nanometer-spaced silicon contacts to proteins

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Schukfeh, M.I.; Sepunaru, L.; Behr, P.; Li, W.; Pecht, I.; Sheves, M.; Cahen, D.; Tornow, M.
Abstract:
A vertical nanogap device (VND) structure comprising all-silicon contacts as electrodes for the investigation of electronic transport processes in bioelectronic systems is reported. Devices were fabricated from silicon-on-insulator substrates whose buried oxide (SiO2) layer of a few nanometers in thickness is embedded within two highly doped single crystalline silicon layers. Individual VNDs were fabricated by standard photolithography and a combination of anisotropic and selective wet etching t...     »
Zeitschriftentitel:
Nanotechnology . 18; 27(11):115302 2016-03
Jahr:
2016
Jahr / Monat:
2016-03
Quartal:
1. Quartal
Monat:
Mar
Sprache:
en
Volltext / DOI:
doi:10.1088/0957-4484/27/11/115302
WWW:
https://pubmed.ncbi.nlm.nih.gov/26875701/
Verlag / Institution:
PubMed
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