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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Bückle, M.; Hauber, V.C.; Cole, G.D.; Gärtner, C.; Zeimer, U.; Grenzer, J.; Weig, E.M. 
Titel:
Stress control of tensile-strained In1−xGaxP nanomechanical string resonators 
Abstract:
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a c...    »
 
Dewey Dezimalklassifikation:
000 Informatik, Wissen, Systeme 
Zeitschriftentitel:
Appl. Phys. Lett. 113, 201903 (2018) 2018-10 
Jahr:
2018 
Jahr / Monat:
2018-10 
Quartal:
4. Quartal 
Monat:
Oct 
Sprache:
en 
Volltext / DOI:
Verlag / Institution:
Applied Physics Letters AIP