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Document type:
Zeitschriftenaufsatz 
Author(s):
Bückle, M.; Hauber, V.C.; Cole, G.D.; Gärtner, C.; Zeimer, U.; Grenzer, J.; Weig, E.M. 
Title:
Stress control of tensile-strained In1−xGaxP nanomechanical string resonators 
Abstract:
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a c...    »
 
Dewey Decimal Classification:
000 Informatik, Wissen, Systeme 
Journal title:
Appl. Phys. Lett. 113, 201903 (2018) 2018-10 
Year:
2018 
Year / month:
2018-10 
Quarter:
4. Quartal 
Month:
Oct 
Language:
en 
Fulltext / DOI:
Publisher:
Applied Physics Letters AIP