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- Title:
Fabrication of two-dimensional hard X-ray diffraction gratings
- Author(s):
- Rutishauser, S.; Bednarzik, M.; Zanette, I.; Weitkamp, T.; Börner, M.; Mohr, J.; David, C.
- Journal title:
- Microelectronic Engineering
- Year:
- 2013
- Journal volume:
- 101
- Pages contribution:
- 12-16
- Fulltext / DOI:
- doi:10.1016/j.mee.2012.08.025
- Publisher:
- Elsevier BV
- Date of publication:
- 01.01.2013
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