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Titel:

Technology assessment of a novel high-yield lithographic technique for sub-15-nm direct nanotransfer printing of nanogap electrodes

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Harrer, S.; Strobel, S.; Scarpa, G.; Tornow, M.; Abstreiter, G.; Lugli, P.
Abstract:
We have demonstrated direct nanoscale transfer printing (nTP) of PdAu lines from a hard mold onto a hard substrate at room temperature without employing any flexible buffer layers or organic adhesion promoters or release agent layers. PdAu was evaporated onto the mold surface, and a Ti layer was deposited on top of the PdAu layer. By pressing the mold against a Si/SiO2 substrate, the PdAu/Ti sandwich structure was directly transferred onto the SiO2 surface. The molds used in these experiments we...     »
Zeitschriftentitel:
Nanotechnology, IEEE Transactions on (Volume:8 , Issue: 6 )
Jahr:
2009
Jahr / Monat:
2009-11
Quartal:
4. Quartal
Monat:
Nov
Seitenangaben Beitrag:
662-670
Sprache:
en
Volltext / DOI:
doi:10.1109/TNANO.2009.2024685
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5071211
Verlag / Institution:
IEEE Xplore Digital Library
Format:
Text
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