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- Title:
Properties of Tungsten Thin Films Produced with the RF-Sputtering Technique
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Roth, S.; Ciemniak, C.; Coppi, C.; Feilitzsch, F.v.; Gütlein, A.; Isaila, C.; Lanfranchi, J.-C.; Pfister, S.; Potzel, W.; Westphal, W.
- Journal title:
- Journal of Low Temperature Physics
- Year:
- 2008
- Journal volume:
- 151
- Journal issue:
- 1 -2
- Pages contribution:
- 216 -- 222
- Language:
- en
- Format:
- Text
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