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- Title:
Growth of Crystalline Gd2O3 Thin Films with a High-Quality Interface on Si(100) by Low-Temperature H2O-Assisted Atomic Layer Deposition
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Milanov, Andrian P.; Xu, Ke; Laha, Apurba; Bugiel, Eberhard; Ranjith, Ramadurai; Schwendt, Dominik; Osten, H. Jörg; Parala, Harish; Fischer, Roland A.; Devi, Anjana
- Journal title:
- Journal of the American Chemical Society
- Year:
- 2009
- Journal volume:
- 132
- Journal issue:
- 1
- Pages contribution:
- 36-37
- Fulltext / DOI:
- doi:10.1021/ja909102j
- Publisher:
- American Chemical Society (ACS)
- E-ISSN:
- 0002-78631520-5126
- Date of publication:
- 14.12.2009
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