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- Title:
Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Gaßner, Simon ; Essing, Simon ; Tumpold, David ; Schmitt, Katrin ; Wöllenstein, Jürgen
- Journal title:
- Journal of Sensors and Sensor Systems
- Year:
- 2024
- Journal volume:
- 13
- Journal issue:
- 2
- Pages contribution:
- 219-226
- Fulltext / DOI:
- doi:10.5194/jsss-13-219-2024
- Publisher:
- Copernicus Publications
- E-ISSN:
- 2194-878X
- Date of publication:
- 02.08.2024
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