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- Title:
Tunable Encapsulation and Doping of Monolayer MoS2 by In Situ Probing of Excitonic Properties During Atomic Layer Deposition
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Henning, Alex ; Levashov, Sergej ; Qian, Chenjiang ; Grünleitner, Theresa ; Primbs, Julian ; Finley, Jonathan J. ; Sharp, Ian D.
- Keywords:
- Research Article ; Research Articles ; 2D materials integration ; 2D materials protection ; atomic layer deposition ; in situ ellipsometry ; monolayer MoS ; ultrathin aluminum oxide
- Journal title:
- Advanced Materials Interfaces
- Year:
- 2023
- Journal volume:
- 10
- Journal issue:
- 15
- Fulltext / DOI:
- doi:10.1002/admi.202202429
- E-ISSN:
- 2196-7350
- Date of publication:
- 18.04.2023
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