In this doctoral thesis, chemical vapor deposition (CVD) is established and optimized for fabrication of the 2D transition metal dichalcogenide (TMD) molybdenum disulfide (MoS
2). Using this technique, we study the integration of MoS
2 for large-scale device production with spatial control, develop a new thin film conductive support structure for improved optoelectronic performance, and modify the optoelectronic properties of MoS
2 via deterministic defect generation for applications in photocatalysis and single photon emitters.
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In this doctoral thesis, chemical vapor deposition (CVD) is established and optimized for fabrication of the 2D transition metal dichalcogenide (TMD) molybdenum disulfide (MoS
2). Using this technique, we study the integration of MoS
2 for large-scale device production with spatial control, develop a new thin film conductive support structure for improved optoelectronic performance, and modify the optoelectronic properties of MoS
2 via deterministic defect generation for applications in photocataly...
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