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Document type:
Journal Article
Author(s):
Pinzek, Simon; Gustschin, Alex; Gustschin, Nikolai; Viermetz, Manuel; Pfeiffer, Franz
Title:
Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates.
Abstract:
Grating-based X-ray imaging employs high aspect ratio absorption gratings to generate contrast induced by attenuating, phase-shifting, and small-angle scattering properties of the imaged object. The fabrication of the absorption gratings remains a crucial challenge of the method on its pathway to clinical applications. We explore a simple and fast centrifugal tungsten particle deposition process into silicon-etched grating templates, which has decisive advantages over conventional methods. For t...     »
Journal title abbreviation:
Sci Rep
Year:
2022
Journal volume:
12
Journal issue:
1
Fulltext / DOI:
doi:10.1038/s41598-022-08222-z
Pubmed ID:
http://view.ncbi.nlm.nih.gov/pubmed/35354819
Print-ISSN:
2045-2322
TUM Institution:
Institut für Diagnostische und Interventionelle Radiologie
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