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Title:

Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

Document type:
Zeitschriftenaufsatz
Author(s):
Pinzek, Simon; Beckenbach, Thomas; Viermetz, Manuel; Meyer, Pascal; Gustschin, Alex; Andrejewski, Jana; Gustschin, Nikolai; Herzen, Julia; Schulz, Joachim; Pfeiffer, Franz
Journal title:
Journal of Micro/Nanopatterning, Materials, and Metrology
Year:
2021
Journal volume:
20
Journal issue:
04
Fulltext / DOI:
doi:10.1117/1.jmm.20.4.043801
Publisher:
SPIE-Intl Soc Optical Eng
E-ISSN:
2708-8340
Date of publication:
04.10.2021
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