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Titel:

Metastable Ta2N3 with highly tunable electrical conductivity via oxygen incorporation

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Jiang, Chang-Ming; Wagner, Laura I.; Horton, Matthew K.; Eichhorn, Johanna; Rieth, Tim; Kunzelmann, Viktoria F.; Kraut, Max; Li, Yanbo; Persson, Kristin A.; Sharp, Ian D.
Abstract:
The binary Ta–N chemical system includes several compounds with notable prospects in microelectronics, solar energy harvesting, and catalysis. Among these, metallic TaN and semiconducting Ta3N5 have garnered significant interest, in part due to their synthetic accessibility. However, tantalum sesquinitride (Ta2N3) possesses an intermediate composition and largely unknown physical properties owing to its metastable nature. Herein, Ta2N3 is directly deposited by reactive magnetron sputtering and i...     »
Zeitschriftentitel:
Materials Horizons
Jahr:
2021
Band / Volume:
8
Heft / Issue:
6
Seitenangaben Beitrag:
1744-1755
Volltext / DOI:
doi:10.1039/d1mh00017a
WWW:
https://pubs.rsc.org/en/content/articlelanding/2021/MH/D1MH00017A
Verlag / Institution:
Royal Society of Chemistry (RSC)
E-ISSN:
2051-63472051-6355
Publikationsdatum:
01.01.2021
Copyright Informationen:
https://creativecommons.org/licenses/by/3.0/
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