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Title:

Metastable Ta2N3 with highly tunable electrical conductivity via oxygen incorporation

Document type:
Zeitschriftenaufsatz
Author(s):
Jiang, Chang-Ming; Wagner, Laura I.; Horton, Matthew K.; Eichhorn, Johanna; Rieth, Tim; Kunzelmann, Viktoria F.; Kraut, Max; Li, Yanbo; Persson, Kristin A.; Sharp, Ian D.
Abstract:
The binary Ta–N chemical system includes several compounds with notable prospects in microelectronics, solar energy harvesting, and catalysis. Among these, metallic TaN and semiconducting Ta3N5 have garnered significant interest, in part due to their synthetic accessibility. However, tantalum sesquinitride (Ta2N3) possesses an intermediate composition and largely unknown physical properties owing to its metastable nature. Herein, Ta2N3 is directly deposited by reactive magnetron sputtering and i...     »
Journal title:
Materials Horizons
Year:
2021
Journal volume:
8
Journal issue:
6
Pages contribution:
1744-1755
Fulltext / DOI:
doi:10.1039/d1mh00017a
WWW:
https://pubs.rsc.org/en/content/articlelanding/2021/MH/D1MH00017A
Publisher:
Royal Society of Chemistry (RSC)
E-ISSN:
2051-63472051-6355
Date of publication:
01.01.2021
Copyright statement:
https://creativecommons.org/licenses/by/3.0/
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