- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Pinzek, Simon; Beckenbach, Thomas; Viermetz, Manuel; Meyer, Pascal; Gustschin, Alex; Andrejewski, Jana; Gustschin, Nikolai; Herzen, Julia; Schulz, Joachim; Pfeiffer, Franz
- Title:
- Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube
- Journal title:
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Year:
- 2021
- Journal volume:
- 20
- Journal issue:
- 04
- Fulltext / DOI:
- doi:10.1117/1.jmm.20.4.043801
- Publisher:
- SPIE-Intl Soc Optical Eng
- E-ISSN:
- 2708-8340
- Date of publication:
- 04.10.2021
BibTeX