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- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Burgmann, S.; Lid, M.J.; Johnsen, H.J.D.; Vedvik, N.P.; Haugen, B.; Provine, J.; van Helvoort, A.T.J.; Torgersen, J.
- Title:
- New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers
- Journal title:
- Heliyon
- Year:
- 2024
- Journal volume:
- 10
- Journal issue:
- 4
- Pages contribution:
- e26420
- Covered by:
- Scopus; Web of Science
- Fulltext / DOI:
- doi:10.1016/j.heliyon.2024.e26420
- Publisher:
- Elsevier BV
- E-ISSN:
- 2405-8440
- Date of publication:
- 01.02.2024
- TUM Institution:
- Lehrstuhl für Werkstoffwissenschaften
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