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- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Bin Afif, Abdulla; Dadlani, Anup L.; Flaten, Andreas; Lid, Markus Joakim; Ofstad, Johannes; Erbe, Andreas; Köllensperger, Peter; Torgersen, Jan
- Title:
- A toolbox for easy entry low wavenumber in situ atomic layer deposition transmission FTIR spectroscopy studies
- Journal title:
- Review of Scientific Instruments
- Year:
- 2022
- Journal volume:
- 93
- Journal issue:
- 8
- Pages contribution:
- 085107
- Covered by:
- Scopus; Web of Science
- Fulltext / DOI:
- doi:10.1063/5.0102518
- Publisher:
- AIP Publishing
- E-ISSN:
- 0034-67481089-7623
- Date of publication:
- 01.08.2022
- TUM Institution:
- Lehrstuhl für Werkstoffwissenschaften
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