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- Document type:
- Patent
- Patent number:
- US000008420526B2
- Inventor:
- GUTSCHE MARTIN, DE KREUPL FRANZ, DE SEIDL HARALD, DE
- Assignee:
- GUTSCHE MARTIN, DE KREUPL FRANZ, DE SEIDL HARALD, DE
- Title:
- Vertical interconnect structure, memory device and associated production method
- Patent office:
- US
- Publication date patent:
- 16.04.2013
- Year:
- 2013
- Language:
- en
- Covered by:
- Scopus
- TUM Institution:
- Hybride Elektronische Systeme
- Format:
- Text
BibTeX