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Document type:
Patentanmeldung
Patent application number:
US2013126821A1
Inventor:
Sekar; Deepak Chandra; (San Jose, CA) ; Kreupl; Franz; (Munchen, DE) ; Makala; Raghuveer S.; (Sunnyvale, CA)
Assignee:
Sekar; Deepak Chandra; (San Jose, CA) ; Kreupl; Franz; (Munchen, DE) ; Makala; Raghuveer S.; (Sunnyvale, CA)
Title:
BOTTOM ELECTRODES FOR USE WITH METAL OXIDE RESISTIVITY SWITCHING LAYERS
Abstract:
In a first aspect, a metal-insulator-metal ("MIM") stack is provided that includes a first conductive layer, a resistivity-switching layer having a metal oxide layer formed above the first conductive layer, a material layer between the first conductive layer and the resistivity-switching layer, and a second conductive layer above the resistivity-switching layer. The first conductive layer includes a multi-layer metal-silicide stack, and the material layer has a Gibbs free energy of formation per...     »
Patent office:
US
Date of application:
14.01.2013
Publication date application:
23.05.2013
Year:
2013
Language:
en
Covered by:
Scopus
TUM Institution:
Hybride Elektronische Systeme
Format:
Text
 BibTeX