Thin film interferometer using a light source with spectrally non-equidistantly distributed sampling points

Titel:: Thin film interferometer using a light source with spectrally non-equidistantly distributed sampling points
Dokumenttyp:: Konferenzbeitrag
Autor(en):: Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.; Koch, A.W.
Kongress- / Buchtitel:: Proceedings of the SPIE Europe Optical Metrology Conference
Kongress / Zusatzinformationen:: ICM-International Conference Centre Munich, 14.-18.06.2009, Munich, Germany
Jahr:: 2009
Sprache:: en
Format:: Text
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