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Document type:
Zeitschriftenaufsatz
Author(s):
Furio, A; Stelzer, M; Jung, M; Neitzert, H C; Kreupl, F
Title:
Graphenic carbon as etching mask: patterning with laser lithography and KOH etching
Journal title:
Journal of Physics: Conference Series
Year:
2019
Journal volume:
1226
Pages contribution:
012011
Fulltext / DOI:
doi:10.1088/1742-6596/1226/1/012011
Publisher:
IOP Publishing
E-ISSN:
1742-65881742-6596
Date of publication:
01.05.2019
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