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Title:

Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects

Document type:
Zeitschriftenaufsatz
Author(s):
Pöller, Franziska; Salazar Bloise, Félix; Jakobi, Martin; Wang, Shengjia; Dong, Jie; Koch, Alexander W.
Journal title:
Sensors
Year:
2019
Journal volume:
19
Journal issue:
10
Pages contribution:
2215
Fulltext / DOI:
doi:10.3390/s19102215
Publisher:
MDPI AG
E-ISSN:
1424-8220
Date of publication:
14.05.2019
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