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Document type:
Zeitschriftenaufsatz
Author(s):
Bosetti, Gabriele; Manz, Johannes; Krumbein, Ulrich; Schrag, Gabriele
Title:
Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers
Journal title:
Proceedings
Year:
2018
Journal volume:
2
Journal issue:
13
Pages contribution:
1024
Fulltext / DOI:
doi:10.3390/proceedings2131024
Publisher:
MDPI AG
E-ISSN:
2504-3900
Date of publication:
13.11.2018
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