Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

Title:: Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers
Document type:: Zeitschriftenaufsatz
Author(s):: Bosetti, Gabriele; Manz, Johannes; Krumbein, Ulrich; Schrag, Gabriele
Journal title:: Proceedings
Year:: 2018
Journal volume:: 2
Journal issue:: 13
Pages contribution:: 1024
Fulltext / DOI:: doi:10.3390/proceedings2131024
Publisher:: MDPI AG
E-ISSN:: 2504-3900
Date of publication:: 13.11.2018
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