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- Title:
SIESTA: A high current ion source for erosion and retention studies
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Arredondo, R.; Oberkofler, M.; Schmid, K.; Schwarz-Selinger, T.; Jacob, W.; Neu, R.
- Journal title:
- Review of Scientific Instruments
- Year:
- 2018
- Journal volume:
- 89
- Journal issue:
- 10
- Pages contribution:
- 103501
- Fulltext / DOI:
- doi:10.1063/1.5039156
- Publisher:
- AIP Publishing
- E-ISSN:
- 0034-67481089-7623
- Date of publication:
- 01.10.2018
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