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- Title:
Investigations on a Novel Silicon MEMS Microphone Concept for a High Signal-to-Noise Ratio
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Manz, J.; Schrag, G.; Dehe, A.; Krumbein, U.; Wachutka, G.
- Pages contribution:
- pp. 54-55
- Book / Congress title:
- MICROSYSTEMS TECHNOLOGY IN GERMANY 2018
- Year:
- 2018
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elektrophysik
- Ingested:
- 04.12.2018
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