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Titel:

Stress control of tensile-strained In1−xGaxP nanomechanical string resonators

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Bückle, M.; Hauber, V.C.; Cole, G.D.; Gärtner, C.; Zeimer, U.; Grenzer, J.; Weig, E.M.
Abstract:
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a c...     »
Dewey Dezimalklassifikation:
000 Informatik, Wissen, Systeme
Zeitschriftentitel:
Appl. Phys. Lett. 113, 201903 2018-10
Jahr:
2018
Jahr / Monat:
2018-10
Quartal:
4. Quartal
Monat:
Oct
Sprache:
en
Volltext / DOI:
doi:10.1063/1.5054076
WWW:
https://aip.scitation.org/doi/10.1063/1.5054076
Verlag / Institution:
Applied Physics Letters AIP
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