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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Weiler, B.; Nagel, R.; Albes, T.; Haeberle, T.; Gagliardi, A.; Lugli, P. 
Titel:
Electrical and morphological characterization of transfer-printed Au/Ti/TiOx/p+-Si nano- and microstructures with plasma-grown titanium oxide layers 
Abstract:
Highly-ordered, sub-70 nm-MOS-junctions of Au/Ti/TiOx/p+-Si were efficiently and reliably fabricated by nanotransfer-printing (nTP) over large areas and their functionality was investigated with respect to their application as MOS-devices. First, we used a temperature-enhanced nTP process and integrated the plasma-oxidation of a nm-thin titanium film being e-beam evaporated directly on the stamp before the printing step without affecting the p+-Si substrate. Second, morphological investigations...    »
 
Stichworte:
Plasma materials processing Current density Nanostructures Titanium Gold 
Zeitschriftentitel:
J. Appl. Phys. 119, 145106 (2016) 2016-04 
Jahr:
2016 
Jahr / Monat:
2016-04 
Quartal:
2. Quartal 
Monat:
Apr 
Sprache:
en 
Volltext / DOI:
Verlag / Institution:
AIP Publishing LLC