Benutzer: Gast  Login
Titel:

Performance Improvement of Graphenic Carbon X-ray Transmission Windows

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Sebastian Huebner, Natsuki Miyakawa, Andreas Pahlke, Franz Kreupl
Abstract:
Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonstrated for a GC thickness of 650 nm. The GC membranes outperform beryllium (Be) windows, in terms of...     »
Zeitschriftentitel:
MRS Advances
Jahr:
2016
Band / Volume:
Available on CJO 2016 doi:10.1557/adv.2016.194
Jahr / Monat:
2016-03
Monat:
Mar
Heft / Issue:
MRS Advances / FirstView Article / March 2016, pp 1 - 6 DOI: 10.1557/adv.2016.194, Published online: 14 March 2016
Seitenangaben Beitrag:
6
Nachgewiesen in:
Scopus
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1557/adv.2016.194
WWW:
http://journals.cambridge.org/abstract_S2059852116001948%2520
Verlag / Institution:
Cambridge University Press
Status:
Verlagsversion / published
TUM Einrichtung:
Hybride Elektronische Systeme
 BibTeX