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Titel:

Carbon-based Materials as Key-Enabler for “More-than-Moore“ Devices

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Vortrag / Präsentation
Autor(en):
Franz Kreupl
Abstract:
The talk will assess carbon-based materials like nanotubes and graphene in possible “More-than-Moore” applications. The requirements for the use in future transistor devices and interconnects is reviewed and the discussion is extended to applications which are not ultimately scaled to the smallest size. We show the application of graphenic carbon, which requires a high temperature budget for the deposition, in capacitors, diodes, through-silicon vias, novel non-volatile memories and sensors. The...     »
Stichworte:
Plenary Talk
Kongress- / Buchtitel:
Micro- and Nanoengineering (MNE) 2016
Ausrichter der Konferenz:
MNE
Datum der Konferenz:
20.09.2016
Publikationsdatum:
20.09.2016
Jahr:
2016
Sprache:
en
TUM Einrichtung:
Hybride Elektronische Systeme
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