Selective epitaxy and growth on structured surfaces of indium phosphide by LP-MOVPE for mid-infrared quantum cascade lasers

Titel:: Selective epitaxy and growth on structured surfaces of indium phosphide by LP-MOVPE for mid-infrared quantum cascade lasers
Dokumenttyp:: Konferenzbeitrag
Autor(en):: H. Schmeiduch, F. Demmerle, S. Saller, S. Sprengel, R. Meyer and M. C. Amann
Kongress- / Buchtitel:: Semiconductor Integrated Optoelectronics Conference (SIOE)
Jahr:: 2016
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