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- Title:
{T}est structures for {CMOS} {RF} reliability assessment
- Author(s):
- Heiß, L.; Lachmann, A.; Schwab, R.; Panagopoulos, G.; Baumgartner, P.; Virupakshappaa, M. Y.; Schmitt-Landsiedel, D.
- Keywords:
- CMOS integrated circuits; high-k dielectric thin films; integrated circuit reliability; integrated circuit testing; oscilloscopes; radiofrequency integrated circuits; CMOS RF reliability assessment; HKMG technology; OCO; RF stress; high-k-metal-gate technology; on-chip AC stress circuits; on-chip oscilloscope; test structures; Clocks; Integrated circuit reliability; Radio frequency; Stress; Stress measurement; System-on-chip
- Book / Congress title:
- 2016 International Conference on Microelectronic Test Structures (ICMTS)
- Year:
- 2016
- Month:
- March
- Pages:
- 76-81
- Fulltext / DOI:
- doi:10.1109/ICMTS.2016.7476178
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