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Title:

Low-temperature atomic layer deposition of copper(II) oxide thin films

Document type:
Zeitschriftenaufsatz
Author(s):
Iivonen, Tomi; Hämäläinen, Jani; Marchand, Benoît; Mizohata, Kenichiro; Mattinen, Miika; Popov, Georgi; Kim, Jiyeon; Fischer, Roland A.; Leskelä, Markku
Journal title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Year:
2015
Journal volume:
34
Journal issue:
1
Fulltext / DOI:
doi:10.1116/1.4933089
Publisher:
American Vacuum Society
E-ISSN:
0734-21011520-8559
Date of publication:
13.10.2015
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