In the presented thesis, a miniaturized particle sensor is being described, which measures the concentration of particles in air. Applying Mie-theory, the size of the particles is determined from the light scattered by a laser beam in two solid angle intervals. Accordingly adjusted Fresnel ring lens segments increased the scattering signals, hence improving the sensitivity. It was possible to measure particles with diameters down to about 100 nm. Additional processing techniques are demonstrated with which a good accuracy of the particle sizes could be achieved.
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In the presented thesis, a miniaturized particle sensor is being described, which measures the concentration of particles in air. Applying Mie-theory, the size of the particles is determined from the light scattered by a laser beam in two solid angle intervals. Accordingly adjusted Fresnel ring lens segments increased the scattering signals, hence improving the sensitivity. It was possible to measure particles with diameters down to about 100 nm. Additional processing techniques are demonstrated...
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