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Title:

New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers

Document type:
Zeitschriftenaufsatz
Author(s):
Burgmann, S.; Lid, M.J.; Johnsen, H.J.D.; Vedvik, N.P.; Haugen, B.; Provine, J.; van Helvoort, A.T.J.; Torgersen, J.
Journal title:
Heliyon
Year:
2024
Journal volume:
10
Journal issue:
4
Pages contribution:
e26420
Covered by:
Scopus; Web of Science
Fulltext / DOI:
doi:10.1016/j.heliyon.2024.e26420
Publisher:
Elsevier BV
E-ISSN:
2405-8440
Date of publication:
01.02.2024
TUM Institution:
Lehrstuhl für Werkstoffwissenschaften
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