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Title:

A toolbox for easy entry low wavenumber in situ atomic layer deposition transmission FTIR spectroscopy studies

Document type:
Zeitschriftenaufsatz
Author(s):
Bin Afif, Abdulla; Dadlani, Anup L.; Flaten, Andreas; Lid, Markus Joakim; Ofstad, Johannes; Erbe, Andreas; Köllensperger, Peter; Torgersen, Jan
Journal title:
Review of Scientific Instruments
Year:
2022
Journal volume:
93
Journal issue:
8
Pages contribution:
085107
Covered by:
Scopus; Web of Science
Fulltext / DOI:
doi:10.1063/5.0102518
Publisher:
AIP Publishing
E-ISSN:
0034-67481089-7623
Date of publication:
01.08.2022
TUM Institution:
Lehrstuhl für Werkstoffwissenschaften
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