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Document type:
Zeitschriftenaufsatz 
Author(s):
Seitner, M.J.; Gajo, K.; Weig, E.M. 
Title:
Damping of metallized bilayer nanomechanical resonators at room temperature 
Abstract:
We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality factor and damping for both in- and out-of-plane flexural modes of the bilayer system are presented, which allows for the determination of effective elastic parameters of the composite structure from our experimental data. We find the inverse quality factor to s...    »
 
Journal title:
Appl. Phys. Lett. 105, 213101 (2014) 2014-11 
Year:
2014 
Year / month:
2014-11 
Quarter:
4. Quartal 
Month:
Nov 
Language:
en 
Fulltext / DOI:
Publisher:
Applied Physics Letters AIP