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Document type:
Zeitschriftenaufsatz
Author(s):
Arredondo, R.; Oberkofler, M.; Schmid, K.; Schwarz-Selinger, T.; Jacob, W.; Neu, R.
Title:
SIESTA: A high current ion source for erosion and retention studies
Journal title:
Review of Scientific Instruments
Year:
2018
Journal volume:
89
Journal issue:
10
Pages contribution:
103501
Fulltext / DOI:
doi:10.1063/1.5039156
Publisher:
AIP Publishing
E-ISSN:
0034-67481089-7623
Date of publication:
01.10.2018
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