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- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Oswald, Alexander; Merwerth, Jörg; Herzog, Hans-Georg; Hörz, Martin; Meyer, Wolfgang
- Title:
- Developing and testing a direct drive intended for special vacuum application
- Book / Congress title:
- Speedam 2006
- Congress (additional information):
- Taormina - Italy, 23.-26.05.2006
- Year:
- 2006
- Reviewed:
- ja
- Language:
- de
- Semester:
- SS 02
- Format:
- Text
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