Micromechanical sensor for studying heats of surface reactions, adsorption, and cluster deposition processes

We present a newly designed highly sensitive micromech. sensor devoted to thermodn. studies involving supported clusters. The thermally sensitive element of the sensor consists of a micromachined silicon cantilever array, onto which a thin metal film is evapd. Due to the difference between the thermal expansion coeffs. of silicon and the metal employed, thermal bending is obsd. when heat is exchanged with the cantilever. The sensitivity and the response time of the cantilever are studied as a function of the film material (gold or aluminum) and the thickness of the metal film. With our routinely prepd. cantilevers, a min. power of 120 nW is measurable with a submillisecond response time, corresponding to a limit of detection in the femtojoule range. The high sensitivity of the sensor is demonstrated by measuring the heat exchange which occurs during the deposition of clusters on the cantilever. Exptl., we illustrate the 1,3-butadiene hydrogenation reaction using a cluster model catalysts created by soft-landing palladium clusters onto the cantilever surface. [on SciFinder(R)]     «

We present a newly designed highly sensitive micromech. sensor devoted to thermodn. studies involving supported clusters. The thermally sensitive element of the sensor consists of a micromachined silicon cantilever array, onto which a thin metal film is evapd. Due to the difference between the thermal expansion coeffs. of silicon and the metal employed, thermal bending is obsd. when heat is exchanged with the cantilever. The sensitivity and the response time of the cantilever are studied as a fu...     »

CAN 147:279739 47-10 Apparatus and Plant Equipment Lehrstuhl fuer Physikalische Chemie 1, Technische Universitaet Muenchen, Garching, Germany. Journal 0034-6748 7440-05-3 (Palladium) Role: NUU (Other use, unclassified), PEP (Physical, engineering or chemical process), PROC (Process), USES (Uses) (micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process); 106-99-0 (1,3-Butadiene) Role: PEP (Physical, engineering or chemical process), PROC (Process) (micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process)     «

CAN 147:279739 47-10 Apparatus and Plant Equipment Lehrstuhl fuer Physikalische Chemie 1, Technische Universitaet Muenchen, Garching, Germany. Journal 0034-6748 7440-05-3 (Palladium) Role: NUU (Other use, unclassified), PEP (Physical, engineering or chemical process), PROC (Process), USES (Uses) (micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process); 106-99-0 (1,3-Butadiene) Role: PEP (Physical, engineering or chemical process), PROC (Process) (mic...     »