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Title:

Deposition of PdAu thin films sectioned by sub-15-nm gaps on silicon using direct nanotransfer printing

Document type:
Konferenzbeitrag
Author(s):
Strobel, S.; Harrer, S.; Penso-Blanco, G.; Scarpa, G.; Abstreiter, G.; Lugli, P.; Tornow, M.
Abstract:
We have demonstrated direct nanoscale transfer printing of PdAu lines from a hard mold onto a hard substrate at room-temperature without employing any flexible buffer layers or organic adhesion promoters or release agent layers. The molds used in these experiments were GaAs/AlGaAs sandwich structures fabricated by molecular-beam epitaxy that we cleaved and selectively etched afterwards in order to generate 3D grating structures with nanometer resolution on their edges. We fabricated positive mul...     »
Book / Congress title:
2008 8th IEEE Conference on Nanotechnology (NANO). IEEE.
Congress (additional information):
Arlington TX USA, Aug 18 - 21, 2008
Publisher:
IEEE Xplore Digital Library
Year:
2008
Quarter:
3. Quartal
Year / month:
2008-08
Month:
Aug
Pages:
155-156
Language:
en
Fulltext / DOI:
doi:10.1109/NANO.2008.52
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=4617034
Format:
Text
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