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Title:

Micromechanical sensor for studying heats of surface reactions, adsorption, and cluster deposition processes

Author(s):
Antonietti, Jean-Marie; Gong, Jiong; Habibpour, Vahideh; Roettgen, Martin A.; Abbet, Stephane; Harding, Christopher J.; Arenz, Matthias; Heiz, Ulrich; Gerber, Christoph
Abstract:
We present a newly designed highly sensitive micromech. sensor devoted to thermodn. studies involving supported clusters. The thermally sensitive element of the sensor consists of a micromachined silicon cantilever array, onto which a thin metal film is evapd. Due to the difference between the thermal expansion coeffs. of silicon and the metal employed, thermal bending is obsd. when heat is exchanged with the cantilever. The sensitivity and the response time of the cantilever are studied as a fu...     »
Keywords:
Adsorption Clusters Hydrogenation Vapor deposition process (micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process) Sensors (micromech. micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process) Reaction enthalpy (surface micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process) micromech sensor heat surface reaction adsorption cluster deposition
Congress title:
CAN 147:279739 47-10 Apparatus and Plant Equipment Lehrstuhl fuer Physikalische Chemie 1, Technische Universitaet Muenchen, Garching, Germany. Journal 0034-6748 7440-05-3 (Palladium) Role: NUU (Other use, unclassified), PEP (Physical, engineering or chemical process), PROC (Process), USES (Uses) (micromech. sensor for study of heat of surface reaction, adsorption, and cluster deposition process); 106-99-0 (1,3-Butadiene) Role: PEP (Physical, engineering or chemical process), PROC (Process) (mic...     »
Journal title:
Rev. Sci. Instrum.
Year:
2007
Journal volume:
78
Journal issue:
5
Pages contribution:
054101/1-054101/11
Fulltext / DOI:
doi:10.1063/1.2740165
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