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Title:

Tuning the feature size of nanoimprinting stamps: A method to enhance the flexibility of nanoimprint lithography

Document type:
Zeitschriftenaufsatz
Author(s):
Golibrzuch, Matthias; Maier, Thomas L.; Feil, Moritz J.; Krischer, Katharina; Becherer, Markus
Journal title:
Journal of Applied Physics
Year:
2022
Journal volume:
131
Journal issue:
12
Fulltext / DOI:
doi:10.1063/5.0079282
Publisher:
AIP Publishing
E-ISSN:
0021-89791089-7550
Date of publication:
24.03.2022
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